Damping and stiffening forces of a squeeze film between two plates
نویسندگان
چکیده
منابع مشابه
Evaluation of Squeeze-film Damping Effects in MEMS Perforated Plates
In this paper, analytical and numerical methods for simulating squeeze-film air damping affecting suspended and perforated movable micro-surfaces are analyzed. Numerical solutions are obtained by full 3-D Navier-Stokes numerical analysis, carried out by a commercial finite element code, COMSOL Multiphysics, and are compared with those obtained using different analytical models proposed in liter...
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An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and flexible microcantilevers affected by squeeze-film damping at low ambient pressures. Our approach extends recent continuum gas damping models (Veijola 2004 J. Micromech. Microeng. 14 1109–18, Gallis and Torczynski 2004 J. Microelectromech. Syst. 13 653–9), which were originally derived for a rigid ...
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Archibald [1] analyzed the performance of a squeeze film between various geometrical configurations. Later on Wu [2, 3] investigated a squeeze film behavior for mainly, two types of geometries namely, annular and rectangular. Prakash and Viz [4] developed some aspects of the analysis incorporated in Wu [2, 3] and obtained the load carrying capacity ultimately leading to time height relation for...
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Figure 1: Schematic experimental set up. Squeezed film damping (SFD) is a common phenomenon that occurs in many microdevices when a surface moves normally to another solid surface in close proximity. In microelectromechanical systems (MEMS), SFD is often one of the largest sources of parasitic losses. Therefore, an accurate evaluation of hydrodynamic forces due to the SFD effect is critical in ...
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ژورنال
عنوان ژورنال: Nonlinear Dynamics
سال: 2016
ISSN: 0924-090X,1573-269X
DOI: 10.1007/s11071-016-3150-1